TESCAN MIRA3 FEGSEM

Applications

Materials Science and Geological Sciences

  • Surface imaging (topology, chemistry, phase contrast)
  • Orientation imaging (automated large scale, image stitching)

Contact

Haiping Sun

Nancy Senabulya Muyanja

Location

Room G022

Acknowledgments

Publications, presentations, and posters resulting from work on this instrument should state: “The authors acknowledge financial support from the University of Michigan College of Engineering and technical support from the Michigan Center for Materials Characterization.

Specifications

  • Accelerating Voltage 0-30kV
  • Filament: Schottky Field Emitter
  • Detectors
    • Secondary Electron Imaging – Everhart-Thornley Detector (ETD)
    • Backscattered Electron Detector (WD > 8mm) 
    • EDS (WD = 15mm) – EDAX
    • EBSD (WD= 10-20mm) – EDAX Hikari Camera
  • SEM Resolution: 1.2nm
  • Imaging mode
    • Resolution Mode (WD = 5-10mm): high resolution and low depth of focus
    • Depth Mode: good resolution and increased depth of focus
    • Field Mode: large field of view, high depth of focus but worse resolution
    • Wide Field Mode (WD >25mm): extra large field of view but focus is not accurate
  • GM Chamber and Sample Stage
    • Internal Diameter: 340mm (width) x 315mm (depth)
    • Maximum Specimen Height: 145mm without rotation stage; 116 with rotation stage
    • Maximum Specimen Weight: up to 8kg
    • Movement: x,y: +/- 65mm,; z: 0 to 100mm. 100mm is where the stage is all the way down; Tilt +/- 90 degree
  • Vacuum: Sputter Ion Pump for FEG and Molecular Drag Pump for chamber and column
  • PC and Software
    • SEM PC
      • MIRA3 Control Software
    • EDAX PC
      • TEAM for EDS and EBSD
      • OIM Analysis is on EDAX PC for EBSD data analysis
  • Sample Requirements
    • Not for magnet materials, especially powder samples.
    • Samples must be compatible with high vacuum, i.e., clean and dry. Samples should be handled with tweezers or gloves.
    • Samples need to be conductive and connected to ground (that is the stage); if not, the surface should be coated with a conductive layer, such as Au or Carbon, then apply a conductive tape, Copper or Carbon tape, connected to the SEM stub. The stub should be tightened by screw.

References and Publications

  1. Electro-Chemo-Mechanical Evolution of Sulfide Solid Electrolyte/Li Metal Interfaces: Operando Analysis and ALD Interlayer Effects, A.L. Davis, R. Garcia-Mendez, K.N. Wood, E. Kazyak, K-H. Chen, G. Teeter, J. Sakamoto, N.P. Dasgupta, Journal of Materials Chemistry A, 2020
  2. Multi-Step Crystallization of Self-Organized Spiral Eutectics, S. Moniri, H. Bale, T. Volkenandt, Y. Wang, J. Gao, T. Lu, K. Sun, R.O. Richie, A.J. Shahani, Small, 1906146, 2020
  3. Correlating the Effect of Dopant Type (Al, Ga, Ta) on the Mechanical and Electrical Properties of Hot-Pressed Li-Garnet Electrolyte, G. Han, B. Kinzer, R. Garcia-Mendez, H. Choe, J. Wolfenstine, J. Sakamoto, Journal of the European Ceramic Society, 40(5), 1999-2006, 2020
  4. Hillock Formation in Co-deposited Thin Films of Immiscible Metal Alloy Systems, M. Powers, B. Derby, E. Raeker, N. Champion, A. Misra, Thin Solid Films, 137692, 2019
  5. Surface Morphology and Straight Crack Generation of Ultrafast Laser Irradiated β-Ga203, M. Ahn, A. Sarracino, A. Ansari, B. Torralva, S. Yalisove, J. Phillips, Journal of Applied Physics, 125(22), 223104, 2019
  6. Synergistic Effect of 3D Current Collectors and ALD Surface Modification for High Coulombic Efficiency Lithium Metal Anodes, K. Chen, A. Sanchez, E. Kazyak, A. Davis, N. Dasgupta, Advanced Energy Materials, 9, 2019
  7. A Quadruple-Band Metal-Nitride Nanowire Artificial Photosynthesis System for High Efficiency Photocatalytic Overall Solar Water Splitting, Y. Wang, Y. Wu, K. Sun, Z. Mi, Materials Horizons, 2019
  8. An In0.42Ga0.58N Tunnel Junction Nanowire Photocathode Monolithically Integrated on a Nonplanar Si Wafer, Y. Wang, S. Vanka, J. Gim, Y. Wu, R. Fan, Y. Zhang, J. Shi, M. Shen, R. Hovden, Z. Mi, Nano Energy, 57, 405-413, 2019
  9. Integrated Imaging in Three Dimensions: Providing a New Lens on Grain Boundaries, Particles, and their Correlations in Polycrystalline Silicon, R. Keinan, H. Bale, N. Gueninchault, E.M. Lauridsen, A.J. Shahani, Acta Materialia, 148, 225-234, 2018
  10. Solar Water Oxidation by an InGaN Nanowire Photoanode with a Bandgap of 1.7 eV, S. Chu, S. Vanka, Y. Wang, J. Gim, Y. Wang, Y. Ra, R. Hovden, H. Guo, I. Shih, and Z. Mi, ACS Energy Letters, 3, 307-314, 2018
  11. Grain Size Effects on NiTi Shape Memory Alloy Fatigue Crack Growth, W. LePage, A. Ahadi, W Lenthe, Q.P. Sun, T. Pollock, J. Shaw, S. Daly, Journal of Materials Research, 33(2), 91-107, 2018
  12. Deformation Behavior of β’ and β”’ Precipitates in Mg-RE Alloys, E.L.S. Solomon, E.A. Marquis, Materials Letters, 2017
  13. Microstructure of Localized Corrosion Front on Mg Alloys and the Relationship with Hydrogen Evolution, P. Chu, E. Le Mire, E.A. Marquis, Corrosion Science, 128, 253-264, 2017