Materials Science and Geological Sciences

  • Surface imaging (topology, chemistry, phase contrast) in vacuum or environment
  • Chemical analysis and mapping
  • Orientation imaging (automated large scale, image stitching)
  • Raman spectroscopy and imaging
  • Cathodoluminescence and imaging


Nancy Senabulya Muyanja


Room G027


Publications, presentations, and posters resulting from work on this instrument should state: “The authors acknowledge the financial support of the University of Michigan College of Engineering and NSF grant #DMR-1625671, and technical support from the Michigan Center for Materials Characterization.


  • Accelerating Voltage 0-30kV
  • Filament: Schottky Field Emitter
  • Detectors
    • Secondary Electron – Everhart-Thornley Detector (ETD)
    • Low vacuum secondary TESCAN detector (LVSTD)
    • Backscattered Electron Detector
    • Backscattered Electron Detector for heating stage
    • EDS – EDAX Octane Elite
    • EBSD – EDAX
    • Cathodoluminescnece (CL) Detector: Gatan Mono CL4
    • Raman (WD = 10mm)- WITec RISE with 785nm and 532nm laser
  • SEM Resolution: 1.0nm
  • Imaging mode
    • Resolution Mode (WD=5-10mm): high resolution and low depth of focus
    • Depth Mode: good resolution and increased depth of focus
    • Field Mode: large field of view, high depth of focus but worse resolution
    • Wide Field Mode (WD >25mm): extra large field of view but focus is not accurate
    • Channeling Mode: pivot point of scanning beam is on a single point on the sample
  • GM Chamber and Sample Stage
    • Internal Diameter: 340mm (width) x 315mm (depth)
    • Maximum Specimen Height: 145mm without rotation stage; 116 with rotation stage.
    • Maximum Specimen Weight: up to 8kg.
    • Movement: x,y: +/- 65mm,; z: 0 to 100mm. 100mm is where the stage is all the way down; Tilt +/- 90 degree.
    • Heating Stage: Kammarath & Weiss 1000°C maximum
    • Integrated Stage for Raman
  • Vacuum: Sputter Ion Pump and Molecular Drag Pump
    • High Vacuum Mode: < 9×10-3Pa
    • Low Vacuum Mode (UniVac): 7-500 Pa
  • PC and Software
    • SEM PC: MIRA3 Control Software
    • Raman PC: Control FIVE
    • EDAX PC: TEAM for both EDS and EBSD
    • CL PC: DMS 3 with DigiScan II
  • Sample Requirements
    • Not for magnetic materials, especially powder samples.
    • Samples must be compatible with high vacuum, i.e., clean and dry. Samples should be handled with tweezers or gloves.
    • Sample surface needs to be conductive and connected to ground (that is the stage), if not, the surface should be coated with a conductive layer, such Au or Carbon, then apply a conductive tape, Copper or Carbon tape, connected to the SEM stub. The stub should be tightened by screw.


  1. Open-Source Toolkit: Benchtop Carbon Fiber Microelectrode Array for Nerve Recording, J.M. Richie, P.R. Patel, E.J. Welle, T. Dong, L. Chen, A.J. Shih, C.A. Chestek, Journal of Visualized Experiments, 176, 2021
  2. Compositional and Morphological Properties of Platinum-Iridium Electrodeposited on Carbon Fiber Microelectrodes, E. della Valle, E.J. Welle, C.A. Chestek, J.D. Weiland, Journal of Neural Engineering, 18(5), 2021
  3. Geometric Optimization of Bismuth Vanadate Core–Shell Nanowire Photoanodes using Atomic Layer Deposition, A.R. Bielinski, A.J. Gayle, S. Lee, N.P. Dasgupta, ACS Applied Materials & Interfaces, 2021
  4. Sub-100 nm high spatial frequency periodic structures driven by femtosecond laser induced desorption in GaAs, A. Sarracino, A.R. Ansari, B. Torralva, S. Yalisove, Applied Physics Letters, 119, 019902, 2021
  5. Copper Transformation, Speciation, and Detoxification in Anoxic and Suboxic Freshwater Sediments, E.C. Cervi, S. Clark, K.E. Boye, J.P. Gustafsson, S. Baken, G.A. Burton Jr., Chemosphere, 282, 131063, 2021
  6. Effects of Minor Alloying Elements on Alumina Transformation During the Transient Oxidation of β-NiAl, T.L. Barth, E.A. Marquis, Oxidation of Metals, 95, 293-309, 2021
  7. Growth Parameter Based Control of Cation Disorder in MgSnN2 Thin Films, K.R. York, R.A. Makin, N. Senabulya, J.P. Mathis, R. Clarke, R.J. Reeves, S.M. Durbin, Journal of Electronic Materials, 2021
  8. Combinatorial Atoh1 and Gfi1 Induction Enhances Hair Cell Regeneration in the Adult Cochlea, S. Lee, J-J. Song, L.A. Beyer, D.L. Swiderski, D.M. Prieskorn, M. Acar, H-I. Jen, A.K. Groves, Y. Raphael, Scientific Reports, 10, 21397, 2020
  9. Sclerostin Antibody Stimulates Periodontal Regeneration in Large Alveolar Bone Defects, Y. Yao, F. Kauffmann, S. Maekawa, L.V. Sarment, J.V. Sugai, C.A. Schmiedeler, E.J. Doherty, G. Holdsworth, P.J. Kostenuik, W.V. Giannobile, Scientific Reports, 10, 16217, 2020
  10. Shape Morphable Hydrogel/Elastomer Bilayer for Implanted Retinal Electronics, M. Zhou, D.H. Kang, J. Kim, J.D. Weiland, Micromachines, 11, 392, 2020
  11. Ultra-Small Carbon Fiber Electrode Recording Site Optimization and Improved in vivo Chronic Recording Yield, E.J. Welle, P.R. Patel, J.E. Woods, A. Petrossians, E. della Valle, A. Vega-Medina, J.M. Richie, D. Cai, J.D. Weiland, C.A. Chestek, Journal of Neural Engineering, 17, 026037, 2020
  12. Design of Biodegradable Nanoparticles to Modulate Phenotypes of Antigen Presenting Cells for Antigen-Specific Treatment of Autoimmune Disease, E. Saito, R. Kuo, N. Gohel, D.A. Giles, B.B. Moore, S.D. Miller, L.D. Shea, Biomaterials, 222, 119432, 2019