Applications
Materials Science and Geological Sciences
- Surface imaging (topology, chemistry, phase contrast) in vacuum or environment
- Chemical analysis and mapping
- Orientation imaging (automated large scale, image stitching)
- Raman spectroscopy and imaging
- Cathodoluminescence and imaging
Contact
Location
Room G027
Acknowledgments
Publications, presentations, and posters resulting from work on this instrument should state: “The authors acknowledge the financial support of the University of Michigan College of Engineering and NSF grant #DMR-1625671, and technical support from the Michigan Center for Materials Characterization.“
Specifications
- Accelerating Voltage 0-30kV
- Filament: Schottky Field Emitter
- Detectors
- Secondary Electron – Everhart-Thornley Detector (ETD)
- Low vacuum secondary TESCAN detector (LVSTD)
- Backscattered Electron Detector
- Backscattered Electron Detector for heating stage
- EDS – EDAX Octane Elite
- EBSD – EDAX
- Cathodoluminescnece (CL) Detector: Gatan Mono CL4
- Raman (WD = 10mm)- WITec RISE with 785nm and 532nm laser
- SEM Resolution: 1.0nm
- Imaging mode
- Resolution Mode (WD=5-10mm): high resolution and low depth of focus
- Depth Mode: good resolution and increased depth of focus
- Field Mode: large field of view, high depth of focus but worse resolution
- Wide Field Mode (WD >25mm): extra large field of view but focus is not accurate
- Channeling Mode: pivot point of scanning beam is on a single point on the sample
- GM Chamber and Sample Stage
- Internal Diameter: 340mm (width) x 315mm (depth)
- Maximum Specimen Height: 145mm without rotation stage; 116 with rotation stage.
- Maximum Specimen Weight: up to 8kg.
- Movement: x,y: +/- 65mm,; z: 0 to 100mm. 100mm is where the stage is all the way down; Tilt +/- 90 degree.
- Heating Stage: Kammarath & Weiss 1000°C maximum
- Integrated Stage for Raman
- Vacuum: Sputter Ion Pump and Molecular Drag Pump
- High Vacuum Mode: < 9×10-3Pa
- Low Vacuum Mode (UniVac): 7-500 Pa
- PC and Software
- SEM PC: MIRA3 Control Software
- Raman PC: Control FIVE
- EDAX PC: TEAM for both EDS and EBSD
- CL PC: DMS 3 with DigiScan II
- Sample Requirements
- Not for magnetic materials, especially powder samples.
- Samples must be compatible with high vacuum, i.e., clean and dry. Samples should be handled with tweezers or gloves.
- Sample surface needs to be conductive and connected to ground (that is the stage), if not, the surface should be coated with a conductive layer, such Au or Carbon, then apply a conductive tape, Copper or Carbon tape, connected to the SEM stub. The stub should be tightened by screw.
