Kratos axis ultra XPS

Contact: Kai Sun

Live webcam

Location: Room G026 
Acknowledgments: Publications resulting from work on this instrument should acknowledge the support of the University of Michigan College of Engineering and NSF grant #DMR-0420785.


X-ray Sources

  • Monochromatic Al source, Al and Mg regular sources.

Operating Conditions

  • Spectrum mode: ~ 10 mA ~ 15 kV.
  • Parallel XPS imaging. 

Vacuum System

  • Specimen Transfer Chamber (STC): <5 x 10-7 torr.
  • Specimen Analysis Chamber (SAC): ~1 x 10-9 torr. 

Specimen Stage

  • Motorized sample movement in x,y,z directions and tilting.
  • Can be operated at ~600 oC to -100 oC. 

Analysis Area

  • Spectrum mode: Using the monochromated Al source: 2 x 1 mm with energy resolution ~0.5 ev.
  • Small area spectroscopy: ~ several µm.
  • Imaging mode: ~ 900 µm x 900 µm with spatial resolution ~ 6 µm.