• EELS mapping on a Si device

    With K2 direct electron detector and fast hardware synchronizing, elemental maps can be acquired in just a few minutes.

  • ELNES mapping on a Si device

    The subtitle change on the edge structure due to different valence states can be resolved by electron-loss near edge structure (ELNES) mapping.

  • HAADF and ABF-STEM images of strontium titanate

    Left: HAADF-STEM image of SrTiO3 [001] showing Sr (bright) and Ti (dark) atomic columns. Right: ABF-STEM image of the same region where O columns are resolved.

  • Sub-angstrom resolution characterization of 1T-TaSSe

    HAADF-STEM image taken on JEOL 3100 R05 demonstrates 80 pm resolution with sub 10 pm precision. The ‘Z’-contrast highlights heavy Tantalum atomic columns as well as Selenium rich columns. The image was averaged over 25 cross-correlated images. Image taken by Suk Hyun Sung. Runners-up winner of Image Contest 2018.

JEOL 3100R05

Applications

  • Aberration-corrected HAADF/LAADF/ABF/BF STEM imaging for atomic structures
  • Fast EELS mapping with K2 direct electron detector
  • Conventional BF/DF TEM imaging, SAED, and aberration-corrected HRTEM imaging
  • Low-dose TEM and energy-filtered TEM with K2 direct electron detector

Contact

Tao Ma

Location

Room G026 (Microscope) and G028 (Control Room)

Acknowledgments

Publications, presentations, and posters resulting from work on this instrument should state: “The authors acknowledge the financial support of the University of Michigan College of Engineering and NSF grant #DMR-0723032, and technical support from the Michigan Center for Materials Characterization.“

Specifications

  • Accelerating Voltage
    • 80, 200 and 300 kV 
  • Filament
    • Tungsten cold field emission tip
  • Vacuum
    • Gun ~1.0 x 10-9 torr
    • Column ~1.0 x 10-7 torr
  • Resolution
    • CTEM 0.055 nm point-to-point
    • STEM 0.055 nm point-to-point
  • Aberration correctors
    • Evaluate and correct aberrations directly from Ronchigram with an autocorrelation function
    • Auto correction on real samples. No standard sample is required.
  • XEDS System
    • Horizontal Ultra-thin Window JEOL SDD X-ray detector (active area = 60 mm2) capable of detecting elements with Z >5.
  • EELS System
    • Gatan Quantum 969 Imaging Filter (GIF) wtih K2 direct electron detector for electron energy loss spectroscopy and imaging.
  • Image Acquisition & Analysis System
    • Gatan Ultrascan 1000 CCD camera for high resolution imaging (above the GIF)
  • Compatible sample Holders
    • JEOL Single-Tilt Stage
    • JEOL Double-Tilt Analytical Stage
    • Gatan #636 Double-Tilt (x=±35 degrees, y=±35 degrees) Low Background (Be) Liquid-Nitrogen Stage.
    • Gatan #652 Double-Tilt Heating Holder with a maximum operating temperature of 1000 degrees Celsius.
  • In-situ holders 
    • Hysitron PI-95 pico-indenter
  • Other Accessories
    • Free lens control, fully independent control of all lenses.
    • TEMCon PC control software.
    • JEOL Cs Correctors for STEM and TEM 

References

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