FEI Quanta 3D e-SEM/FIB

Contact: Bobby Kerns

Live webcam

Location: Room G029
Phone: +1 (734) 764-5630
Acknowledgments: Publications resulting from work on this instrument should acknowledge the support of the University of Michigan College of Engineering and NSF grant #DMR-0320740.


Specifications

Accelerating Voltage

  • Electrons: 0.2 to 30 kV
  • Ions: Up to 30 kV

Electron Filament

  • Tungsten Hairpin

Vacuum

  • Specimen¬†Chamber:¬†1-20 torr

Detectors

  • Imaging – Gaseous Environmental Secondary Detector (GSED)
  • Imaging – Everhart-Thornley Detector (SED)
  • Imaging – Environmental BackScatter Detector
  • X-ray – Noran UTW XEDS Detector with 4Pi analysis system (to be installed)

SEM Resolution

  • 3.5 nm @ 30 kV at high vacuum
  • 3.5 nm @30 kV in ESEM mode
  • 15 nm @ 3 kV in low vacuum mode

Ion Resolution

  • 10 nm @ 30 kV @ 1 pA

XEDS System

  • EDAX 30 mm2 SDD detector, capable of detecting elements with Z >5.
  • XEDS system: EDAX Genesis System with Spectral, Image and Spectrum image acquisition.
  • Off line Software: EDAX and NIST DTSA-II.

Stages

  • Hot Stage, capable of operating from room temperature to 1000 oC.
  • Peltier Cooling Stage, operates from room temperature to ~-50 oC.

Micromanipulator (plucker)

  • Omniprobe 100.5

Included Software

  • AutoFIB, AutoTEM, Slice and View and XtDocu