FEI Nova 200 nanolab SEM/FIB

Contact: Allen Hunter

Live webcam

Location: Room G023
Phone: +1 (734) 764-2944
Acknowledgments: Publications resulting from work on this instrument should acknowledge the support of the University of Michigan College of Engineering and NSF grant #DMR-0320740.


Specifications

Accelerating Voltage

  • Electrons: 0.2 to 30 kV
  • Ions: Up to 30kV

Electron Filament

  • Schottky Field Emitter

Detectors

  • Electron Imaging – Everhart-Thornley Detector (ETD)
  • Electron Imaging – Through-the-lens Detector (TLD)
  • X-ray – EDAX UTW detector

SEM Resolution

  • 1.1 nm @ 15 kV (TLD-SE)
  • 2.5 nm @ 1 kV (TLD-SE)
  • 3.5 nm @ 500 V (TLD-SE)

Ion Resolution

  • 7 nm @ 30 kV @ 1 pA

XEDS System

  • EDAX XEDS system integrated into the Support PC

Gas Injectors

  • Platinum
  • XeF2

Micromanipulator (plucker)

  • Kleindiek Nanotechnik MM3A
  • Omniprobe Autoprobe 200
  • Bigelow Micromanipulator

Included Software

  • AutoFIB, AutoTEM, Slice and View and XtDocu