Applications
- Surface and cross section imaging (topology, chemistry, phase contrast)
- Orientation imaging
- 3D imaging
- TEM and APT specimen preparation
Contact
Location
Room G023
Acknowledgments
Publications, presentations, and posters resulting from work on this instrument should state: “The authors acknowledge the financial support of the University of Michigan College of Engineering and NSF grant #DMR-0320740, and technical support from the Michigan Center for Materials Characterization.“
Specifications
- Accelerating Voltage
- Electrons: 0.2 to 30 kV
- Ions: Up to 30kV
- Electron Filament: Schottky Field Emitter
- Detectors
- Electron Imaging – Everhart-Thornley Detector (ETD)
- Electron Imaging – Through-the-lens Detector (TLD)
- EDAX XEDS system integrated into the Support PC
- SEM Resolution
- 1.1 nm @ 15 kV (TLD-SE)
- 2.5 nm @ 1 kV (TLD-SE)
- 3.5 nm @ 500 V (TLD-SE)
- Ion Resolution: 7 nm @ 30 kV @ 1 pA
- Gas Injectors
- Platinum
- XeF2
- Micromanipulator
- Kleindiek Nanotechnik MM3A
- Omniprobe Autoprobe 200
- Bigelow Micromanipulator
- Included Software
- AutoFIB, AutoTEM, Slice and View and XtDoc
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