FEI Helios 650 nanolab SEM/FIB

Contact: Allen Hunter

Live webcam

Location: Room G025
Phone: +1 (734) 764-2946
Acknowledgments: Publications resulting from work on this instrument should acknowledge the support of the University of Michigan College of Engineering.


Specifications

Accelerating Voltage

  • Electrons: Landing energy 50V to 30 kV
  • Ions: 0.5 kV to 30 kV

Beam Current

  • Electrons: 0.8 pA – 26 nA
  • Ions: 0.1 pA – 65 nA

Electron Filament

  • Schottky Field Emitter

Detectors

  • Secondary Electron Imaging – Everhart-Thornley Detector (ETD)
  • Secondary Electron Imaging – Through-the-lens Detector (TLD)
  • Backscattered Electron Imaging – Concentric Backscatter Deetector (CBS)
  • Scanning Transmission Imaging – STEM Detector (STEM)
  • Ion Imaging – ICE Detector (ICE)
  • NavCam – CCD Camera for sample navigation
  • In chamber viewing via CCD TV camera
  • EBSD – EDAX Hikari 450 pattern per second capable OIM Camera
  • X-ray – EDAX Apollo XL 30mm² UTW silicon drift detector

SEM Resolution

  • 0.8 nm @ 15 kV (TLD-SE)
  • 0.9 nm @ 1 kV (TLD-SE)

Ion Resolution

  • 4.0 nm at 30 kV using preferred statistical method
  • 2.5 nm at 30 kV using selective edge method

Gas Injectors

  • Platinum
  • Insulator Deposition

Micromanipulator

  • Omniprobe Autoprobe 200

Included Software

  • AutoFIB, AutoTEM, 3DEDS, EBS3, Slice and View