Thermo Fisher Nova 200 Nanolab SEM/FIB

Michigan Center for Materials Characterization/Techniques and Instruments/Thermo Fisher Nova 200 Nanolab SEM/FIB

Applications

  • Surface and cross section imaging (topology, chemistry, phase contrast)
  • Orientation imaging
  • 3D imaging
  • TEM and APT specimen preparation

Contact

Allen Hunter

Location

Room G023

Acknowledgments

Publications, presentations, and posters resulting from work on this instrument should state: “The authors acknowledge the financial support of the University of Michigan College of Engineering and NSF grant #DMR-0320740, and technical support from the Michigan Center for Materials Characterization.“

Specifications

  • Accelerating Voltage
    • Electrons: 0.2 to 30 kV
    • Ions: Up to 30kV
  • Electron Filament: Schottky Field Emitter
  • Detectors
    • Electron Imaging – Everhart-Thornley Detector (ETD)
    • Electron Imaging – Through-the-lens Detector (TLD)
    • EDAX XEDS system integrated into the Support PC
  • SEM Resolution
    • 1.1 nm @ 15 kV (TLD-SE)
    • 2.5 nm @ 1 kV (TLD-SE)
    • 3.5 nm @ 500 V (TLD-SE)
  • Ion Resolution: 7 nm @ 30 kV @ 1 pA
  • Gas Injectors
    • Platinum
    • XeF2
  • Micromanipulator
    • Kleindiek Nanotechnik MM3A
    • Omniprobe Autoprobe 200
    • Bigelow Micromanipulator
  • Included Software
    • AutoFIB, AutoTEM, Slice and View and XtDoc

References

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